| Internal wetted surfaces: |
Teflon® PTFE fluoropolymer resin |
| Fluid tubing: |
Teflon® PFA fluoropolymer resin
1/4" O.D., 5/32" I.D. |
| Nonwetted surfaces: |
Delrin®, stainless steel, electroless nickel-plated (ENP) aluminum with a Teflon® fluoropolymer coating |
| O-ring: |
Kalrez® perfluoroelastomer |
| Dispense volume: |
0.5-6.5 mL within limits, depending on dispense rate and fluid viscosity |
| Maximum system volume (with suckback, purge minimum is 0.1mL): |
6.4 mL1 |
| Dispense rates: |
0.08-5 mL/sec in 0.001 mL/sec increments1 |
| Viscosity range: |
1-100 cP1 |
| Dispense accuracy: |
Maintains a mean deviation of ±0.020 mL for 1.00-5.5 mL |
| Dispense repeatability: |
±3 standard deviation <0.02 mL for 1.0-5.5 mL |
| Maximum dispense pressure: |
1.7 bar (25 PSI) @ 2.5 mL/sec |
| Dispense modes: |
Fixed time dispense with optional fixed pre-dispense
Fixed time dispense with coater controlled pre-dispense
10-step multiple fixed time/variable rate dispense with coater controlled pre-dispense |
| Suckback volume: |
0.0-3.0 mL in 0.001 mL increments1 |
| Suckback rate: |
0.02-5 mL/sec in 0.001 mL increments1 |
| Purge volume: |
0.1-5.0 mL in 0.001 mL increments1 |
| Filtration rate: |
0.02-5.0 mL/sec in 0.001 mL/sec increments1 |
| Certifications: |
CE, SEMI S2 |
| Current rating: |
1.25 AMPS maximum |
| Input voltage: |
System: 24 VDC ±10%
Input/Output: 12-24 VDC ±10% |
| Communications baud rate: |
9600 |
| Serial command and control port: |
Multi-drop RS-232 |
| Inlet gas: |
N2 @4.40 ±0.33 bar (65 ±5 PSIG) |
| Vacuum: |
 20" Hg (0.7 bar, 500 Torr) |
| Controller purge: |
N2 |
| Controller venting: |
Approximately 2.75 L/min
(>2X controller volume/min) |
| Dispense system noise level measurements: |
 63 dB(A) |
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