IntelliGen® Mini Dispense System
For photochemical point-of-use dispense
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Delivers ultimate defect reduction in point-of-use photochemical dispense applications. |
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Patented advanced two-stage dispense technology isolates filtration from dispense, maximizing defect reduction and improving yield without sacrificing dispense repeatability. |
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A 50% footprint reduction saves valuable space in track equipment and enables two-stage performance in the same space as a single stage pump. |
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Fill rate control and real-time pressure control maximize filter performance and prevent microbubble formation in even the most sensitive photochemicals. |
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Dispense confirmation provides alarm notification of a partial or failed dispense, preventing costly wafer scrap due to coating problems. |
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Constant pressure filtration optimizes filtration, minimizing defects and increasing yield. |
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Brushless DC motor with closed-loop control delivers extreme repeatability at dispense rates down to 0.1 ml/sec. |
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Disposable, self-contained Impact® 2 OF or Impact® Mini OF filters provide a clean connection and rapid filter change out. |
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Volume-based vent control is more precise than time-based vent control and reduces chemical waste. |
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PTFE-wetted surfaces maintain photochemical purity and provide chemical resistance. |
Click here to download the
latest software for the IntelliGen® Mini. |
To order the IntelliGen® Mini dispense system that is right for your application, contact Entegris, Inc.
| The patented two-stage dispense technology allows the IntelliGen® Mini dispense system to operate filtration and dispense functions independently. This delivers reliable and accurate dispense that ensures process stability. Two-stage dispense technology minimizes the potential to force gels and other particles through the filter as pressure increases across the filter over time. |
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| During dispense the filter is isolated from the dispense chamber to minimize pressure changes that affect repeatability. Using the feed pump and pressure transducer to provide real-time pressure control, fluid is pushed through the filter at the optimum rate for that chemical and filter port size. |
| Dispense volume: |
0.1 - 10.0 ml in 0.001 ml increments |
| Dispense rate: |
0.1 - 3.0 ml/sec. In 0.001 ml/sec. increments |
| Dispense repeatability: |
0.02 ml 3  |
| Viscosity range:1 |
1 - 100 cP |
| Maximum dispense pressure:2 |
0.2 MPa (30 psi) |
| Dispense stage hold-up volume: |
Programmable |
| Fill rate: |
0.1 - 3.0 ml/sec. In 0.001 ml/sec. increments |
| Filtration rate: |
0.1 - 3.0 ml/sec. In 0.001 ml/sec. increments |
| Vent rate: |
0.1 - 3.0 ml/sec. In 0.001 ml/sec. increments |
| Vent frequency: |
1-999 dispense cycles |
| Purge rate: |
0.1 - 3.0 ml/sec. In 0.001 ml/sec. increments |
| Height: |
208 mm (8.2") |
| Width: |
62 mm (2.4") |
| Depth: |
217 mm (8.5") |
| Wetted surfaces: |
Modified PTFE, PTFE, Kalrez® |
| Connection type: |
Insert style |
| Filter: |
Impact® 2 V2 OF, Impact® Mini OF |
| Inlet, outlet and vent tubing: |
6.35 mm (0.25") OD, 3.97 (0.15629") ID |
| Inlet gas type: |
Regulated N2 |
| Inlet gas pressure: |
0.26 - 0.28 Mpa (38 - 40 psi) |
| Current rating: |
1.25A |
| Input voltage (system): |
24 VDC ± 10% |
| Serial communication: |
RS-422 or RS-232 (selectable) |
| Parallel communication: |
Triggers and Acknowledgements |
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| 1Depends on tool configuration. Contact applications support for detailed window of operation. |
| 2Maximum pressure is a limit on the window of operation. Actual volumes and rates may be restricted to comply with the pressure limits for a given viscosity, tubing diameter and tubing length. |
Click to enlarge
In side-by-side testing with the IntelliGen® 3 dispense system, the IntelliGen® Mini dispense system demonstrated both rapid priming and an order of magnitude reduction in liquid particle counts.
Impact® 2 V2 OF and Impact® Mini OF filters combine advanced UPE membrane technology with innovative device design. This design minimizes photochemical exposure and waste while maintaining outstanding point-of-use defect removal performance. Filter replacement is fast and uncomplicated, saving valuable time. No tools are required.
| 1. Pull down the tab on the lever until it clears the catch. |
2. Raise the lever to open the filter manifold. |
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3. Pull out the old filter and slide in a new filter. |
4. Lower the lever until the tab clicks into place on the filter. |
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