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CR8 Series Pneumatically Operated Diaphragm Valves
1/2" Orifice, 3-way
CR8 3-way series valves are designed to divert one media stream into two directions or alternate two media streams into one, minimizing the footprint. The CR8 effectively handles temperature up to 130°C (266°F) in corrosive environments for wet etch and clean applications. At this temperature, the CR8 3-way valve is rated to 276 kPa (40 PSIG) media.
Users will have a variety of connection options available in 1/2" and 3/4" port sizes. Without exposed metal hardware, the valve is completely sealed and protected from harsh chemical environments.
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Three-ported directional valve design enables simplification of piping system design while minimizing footprint |
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Compact 3-way design saves valuable space |
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Sealed actuator with vent port eliminates chemical exposure of the valve spring |
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Valve offered in connection options: Flaretek® and Super 300 Type Pillar®. |
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Versatility and ease in system design |
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Modular design enables manifold customization. |
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High-purity corrosive chemical handling for chemical line size in 1/2" and 3/4" |
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All semiconductor wet clean process chemicals |
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Transporting and protecting your high-purity chemicals |
Build your own part number by selecting from the following options.
| Port Connection |
Flow Factor CV |
Flow Factor KV |
A |
B |
C |
| 1/2" Flaretek® |
1.6 |
22.8 |
4.27" (108.5 mm) |
3.73" (94.7 mm) |
2.13" (54.1 mm) |
| 3/4" Flaretek® |
2.3 |
32.8 |
4.51" (114.6 mm) |
3.85" (97.8 mm) |
2.26" (57.4 mm) |
| 1/2" Super 300 Type Pillar®1 |
1.6 |
22.8 |
3.38" (85.9 mm) |
3.28" (83.3 mm) |
1.69" (42.9 mm) |
| 3/4" Super 300 Type Pillar®1 |
2.3 |
32.8 |
3.73" (94.7 mm) |
3.46" (87.9 mm) |
1.87" (47.5 mm) |
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1Pillar® nuts, inserts and gauge rings supplied separately.
| Remote Position Indication Option: |
| Electronic valve position sensing for monitoring valve open and closed positions. |
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| Note: To enable the remote position indication option you must special order the Espy® sensor (-ES) or the Omron® sensor (-OM) on the valve. In addition, order the Espy® Position Indication Mounting Adapter (ES-IN-01) or Omron® Position Sensor Indicator (EE-SX771R or EE-SX771A), which are sold separately. |
Click to enlarge
| Materials: |
All-wetted parts |
PTFE, PFA |
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Exterior actuator parts |
PVDF, Viton® |
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Interior actuator parts |
PVDF, SST, Viton® |
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Mounting base |
PVDF |
| Operating conditions: |
Media pressure at |
21°C (70°F) |
All ports |
552 kPa (80 PSIG)1 |
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130°C (266°F) |
All ports |
276 kPa (40 PSIG)1 |
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Actuation pressure |
21°C (70°F) |
414–552 kPa (60–80 PSIG)1 |
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130°C (266°F) |
414–483 kPa (60–70 PSIG)1 |
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Temperature range |
Ambient |
21°– 50°C (70°–122°F)1 |
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Fluid |
21°–130°C (70°– 266°F)1 |
| Pneumatic supply port: |
1/4" tube stub; accepts one-touch (push to connect) type fittings or molded female Luer lug style |
| Environmental compliance: |
RoHs, WEE |
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1Actual valve performance varies with pressure and temperature; refer to actual ratings in performance data.
Click to enlarge
Click to enlarge
 Download and view the CR8 3-way Series Pneumatically Operated Valves data sheet in Adobe PDF format. You will first need to have the Adobe Acrobat Reader ActiveX control or plug-in installed on your computer.
These valves are not field reparable. Contact the factory for repair information.
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